Mergers & Acquisitions ·
Onto Innovation Inc. completed the acquisition of a 27% minority equity stake in Rigaku Holdings Corporation on August…
ONTOOnto Innovation Inc.
Onto Innovation Inc. completed the acquisition of a 27% minority equity stake in Rigaku Holdings Corporation on August 10, 2026. The company purchased 61,123,436 shares from Atom Investment, L.P., an affiliate of The Carlyle Group, for approximately $720 million (113 trillion yen). Onto Innovation will account for the investment under the fair value option method and will not consolidate Rigaku’s financial results. Additionally, Onto Innovation will nominate a director to serve on Rigaku's board. This strategic investment deepens collaboration between the two companies to advance X-ray-based process control solutions for semiconductor manufacturing. Onto Innovation Inc. is a leader in process control technologies for the semiconductor industry.